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Diiodosilane [13760-02-6] 99.0%min
Diiodosilane [13760-02-6], Polit scale, 99.0%min, Colorless Liquid.
Diiodosilane [13760-02-6] Identification
Chemical name: Diiodosilane
Synonyms: Diiodosilylene
CAS No.: 13760-02-6
Molecular formula: H2I2Si
Molecular weight: 283.91
Boiling point: 153.749°C @ 760 mmHg
Density: 2.834 g/mL
Diiodosilane Specification
Appearance: Colorless transparent liquid
Purity: 99.00%min by GC
Moisture: 0.10%max by KF
Diiodosilane Package
Regular Packing: N.W 2.5kg/1 L Steel bottle
Sample Packing: 0.1kg-0.1kg/Steel bottle
Transport Information
Class 4.3(8) dangerous goods
UN 3129
PG: I
HS Code: 2931900090
Diiodosilane Application:
Diiodosilane [13760-02-6], as a source of silicon for chemical vapour deposition, is capable of generating more active silicon radicals under plasma enhancement, and the reaction has the characteristics of lower temperature and more controllable pressure operation while maintaining a high deposition rate. The current trend towards ultra-miniaturisation of semiconductor devices (especially chips), breaking the limits of Moore’s Law, often requires improvements in the substrate structure of conventional semiconductors, and DIS as a silicon precursor can be adapted for vapour phase deposition on a wide range of substrates.